1.

Conference Proceedings
Conference Proceedings
1. A novel out-of-plane micro-mirror actuator
A. Michael ; C. Y. Kwok ; C. Kaalund
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68000Q-1-68000Q-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of smooth 45° micromirror using TMAH low concentration solution with NCW-601A surfactant on ‹100› silicon
Y. W. Xu ; A. Michael ; C. Y. Kwok
Pub. info.: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV : 5-7 December 2007, Canberra, Australia.  pp.68001W-1-68001W-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6800
3.

Conference Proceedings
Conference Proceedings
3. Wet anisotropic etching by TMAH with NCW-1002 surfactant on crystalline silicon surface
Y. W. Xu ; A. Michael ; C. Y. Kwok
Pub. info.: Micro- and nanotechnology : materials, processes, packaging, and systems IV : 10-12 December 2008, Melbourne, Australia.  pp.72690U-1-72690U-9,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7269