1.

Conference Proceedings
Conference Proceedings
1. Nanomachining photomask repair of complex patterns
T. Robinson ; A. Dinsdale ; M. Archuletta ; R. Bozak ; R. White
Pub. info.: Photomask technology 2008.  1  pp.71221I-1-71221I-11,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7122
2.

Conference Proceedings
Conference Proceedings
2. Nanomachining processes for 45, 32 nm node mask repair and beyond
T. Robinson ; A. Dinsdale ; R. Bozak ; R. White ; M. Archuletta
Pub. info.: Photomask and next-generation lithography mask technology XV.  1  pp.70281A-1-70281A-13,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7028
3.

Conference Proceedings
Conference Proceedings
3. Advanced mask particle cleaning solutions
T. Robinson ; A. Dinsdale ; R. Bozak ; B. Arruza
Pub. info.: Photomask technology 2007.  2  pp.67301Y-1-67301Y-11,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
4.

Conference Proceedings
Conference Proceedings
4. Repairing 45 nm node defects through nano-machining
R. White ; A. Dinsdale ; T. Robinson ; D. Brinkley ; J. Csuy
Pub. info.: Photomask technology 2007.  2  pp.673021-1-673021-11,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730