1.

Conference Proceedings

Conference Proceedings
N.F. Mohd Nasir ; A.S. Holland ; G.K. Reeves ; P.W. Leech ; A. Collins ; P. Tanner
Pub. info.: Materials, processes, and reliability for advanced interconnects for micro- and nanoelectronics--2011 : symposium held April 25-29, 2011, San Francisco, California, U.S.A..  pp.99-104,  2012.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 1335
2.

Conference Proceedings

Conference Proceedings
J. Hao ; M. W. Lin ; F. Palmieri ; Y. Nishimura ; H. Chao ; M. D. Stewart ; A. Collins ; K. Jen ; C. G. Willson
Pub. info.: Emerging lithographic technologies XI.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6517