1.

Conference Proceedings
Conference Proceedings
1. INTERFACIAL REACTIONS OF COPPER / REFRACTORY ALLOY AND BILAYER FILMS ON SiO2
Spreitzer, R. L. ; Rafalski, S. A. ; Adams, D. ; Russell, S. W. ; Atzmon, Z. ; Li, J. ; Alford, T. L. ; Mayer, J. W.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.631-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337
2.

Conference Proceedings
Conference Proceedings
2. ENHANCED ADHESION OF COPPER FILMS TO SiO2, PSG AND BPSG BY REFRACTORY METAL ADDITIONS
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
Pub. info.: Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A..  pp.613-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 337