1.

Conference Proceedings
Conference Proceedings
1. Material design and evaluation of nanocomposite resist for next generation lithography
Kim, J.-B. ; Kim, K.-S.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.467-475,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Study and control of the interfacial mass transfer of resist components in 193-nm immersion lithography
Ganesan, R. ; Choi, J.-H. ; Yun, H.-J. ; Kwon, Y.-G. ; Kim, K.-S. ; Oh, T.-H. ; Kim, J.-B.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.40-51,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings
Conference Proceedings
3. Study on the application of fiber Bragg grating sensors for the containment structures of nuclear power plants [5855-260]
Kim, K.-S. ; Song, Y.-C. ; Pang, G.-S. ; Yoon, D.-J.
Pub. info.: 17th International Conference on Optical Fibre Sensors.  pp.1056-1059,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5855