1.

Conference Proceedings
Conference Proceedings
1. Experimental Study on Silicon Epitaxial Growth Mechanism by a Fast Wafer-Rotating Chemical Vapor Deposition Reactor
Sato, Y. ; Ohmine, T. ; Saito, Y.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.134-140,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2
2.

Conference Proceedings
Conference Proceedings
2. How to Model CVD Processes - Present Understanding of CVD Mechanism
Egashira, Y. ; Shimogaki, Y. ; Komiyama, H. ; Akiyama, Y. ; Sato, T. ; Imaishi, N. ; Sato, Y. ; Matui, I. ; Ohmine, T.
Pub. info.: Proceedings of the Twelfth International Symposium on Chemical Vapor Deposition.  pp.96-102,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-2