1.

Conference Proceedings
Conference Proceedings
1. REMOTE PLASMA CLEANING AND ION-INDUCED HYDROGEN DESORPTION FROM THE SILICON (100) SURFACE AND ITS APPLICATIONS TO Si EPITAXY
Kinosky, David S. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.
Pub. info.: Beam-solid interactions : fundamentals and applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.831-836,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 279
2.

Conference Proceedings
Conference Proceedings
2. GROWTH OF Ge-ON-Si STRUCTURES USING REMOTE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION
Qian, Rong Z. ; Kinosky, D. ; Mahajan, A. ; Thomas, S. ; Fretwell, J. ; Munguia, P. ; Banerjee, S. ; Tasch, A.
Pub. info.: Semiconductor heterostructures for photonic and electronic applications : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A..  pp.421-426,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 281
3.

Conference Proceedings
Conference Proceedings
3. HYDROGEN PLASMA CLEANING OF THE Si(100) SURFACE: REMOVAL OF OXYGEN AND CARBON AND THE ETCHING OF Si
Kinosky, David ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Munguia, P. ; Fretwell, J. ; Banerjee, S. ; Tasch, A.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.219-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315
4.

Conference Proceedings
Conference Proceedings
4. HF/ALCOHOL PREPARATION OF WAFERS FOR THE REDUCTION OF HAZE IN LOW TEMPERATURE Si EPITAXY BY REMOTE PLASMA CHEMICAL VAPOR DEPOSITION
Kinosky, D. ; Qian, R. ; Mahajan, A. ; Thomas, S. ; Munguia, P. ; Fretwell, J. ; Banerjee, S. ; Tasch, A. ; Magee, C.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.79-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315