1.

Conference Proceedings
Conference Proceedings
1. Wear and breakage monitoring of cutting tools by optical method:theory
Li,J. ; Zhang,Y. ; Chen,F. ; Tian,Z. ; Wang,Y.
Pub. info.: Automated optical inspection for industry : 6-7 November 1996, Beijing, China.  pp.481-487,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2899
2.

Conference Proceedings
Conference Proceedings
2. Ultrathin integrated ion metal plasma titanium and metallorganic titanium nitride liners for sub-O.18-ｦﾌm tungsten-based metallization schemes for>500 MHz microprocessors
Khurana,N. ; Jackson,M. ; Zhang,Z. ; Mandrekar,T. ; Luo,H. ; Li,J. ; Pavate,V. ; Mosely,R. ; Narasimhan,M. ; Chang,M. ; Chen,F.
Pub. info.: Multilevel Interconnect Technology III.  pp.170-180,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3883