Li, Yuntao ; Yang, Richard D. ; Tripathy, S. ; Sue, H. -J. ; Miyatake, N. ; Nishimura, R.
Pub. info.:
Progress in compound semiconductor materials -- electronic and optoelectronic applications. pp.333-338, 2004. Warrendale, Pa.. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.165-170, 2004. Warrendale, Pa.. Materials Research Society
Optical Micro- and Nanometrology in Manufacturing Technology. pp.155-162, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering