1.

Conference Proceedings
Conference Proceedings
1. High-Rate Etching of Metals for Magnetoelectronic Applications
Pearton, S.J. ; Jung, K.B. ; Hong, J. ; Lee, J.W. ; Caballero, J.A. ; Childress, J.R. ; Jenson, M. ; Hurst, A.T., Jr.
Pub. info.: Proceedings of the Twenty-Seventh State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVII).  pp.270-285,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-21
2.

Conference Proceedings
Conference Proceedings
2. Electrical and Optical Properties of C, O and H in III-V Nitrides
Pearton, S.J. ; Lee, J.W. ; Abernathy, C.R. ; Wilson, R.G. ; Zavada, J.M. ; Zolper, J.C.
Pub. info.: Proceedings of the Second Symposium on III-V Nitride Materials and Processes.  pp.209-219,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-34
3.

Conference Proceedings
Conference Proceedings
3. Ion Implantation in Wide Bandgap Semiconductors: Device Needs and Technological Challenges
Zolper, J.C. ; Pearton, S.J.
Pub. info.: Proceedings of the Second Symposium on III-V Nitride Materials and Processes.  pp.76-82,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-34
4.

Conference Proceedings
Conference Proceedings
4. The Role of Plasma Chemistry and Ion Density in Dry Etching of Nitrides
Vartuli, C.B. ; Pearton, S.J. ; Abernathy, C.R. ; Shul, R.J. ; Ren, F.
Pub. info.: Proceedings of the Second Symposium on III-V Nitride Materials and Processes.  pp.39-56,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-34
5.

Conference Proceedings
Conference Proceedings
5. Device Processing of Wide Bandgap Semiconductors - Challenges and Directions
Pearton, S.J. ; Ren, F. ; Shul, R.J. ; Zolper, J.C.
Pub. info.: Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI).  pp.138-161,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-1