1.

Conference Proceedings
Conference Proceedings
1. High Microwave Power ECR Etching of III-V Semiconductors in CH4/H2/Ar
Lee, J.W. ; Pearton, S.J. ; Lambers, E.S. ; Mileham, J.R. ; Abernathy, C.R. ; Hobson, W.S. ; Ren, F. ; Shul, R.J.
Pub. info.: Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors.  pp.203-213,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-2
2.

Conference Proceedings
Conference Proceedings
2. ECR, ICP and RIE plasma etching of GaN
Shul, R.J. ; McClellan, G.B. ; Rieger, D.J. ; Hafich, M.J. ; Drummond, T.J. ; Pearton, S.J. ; Abernathy, C.R. ; Constantine, C. ; Barratt, C. ; Karlicek, R.F., Jr. ; Tran, A.C. ; Schurmann, M.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.159-167,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
3.

Conference Proceedings
Conference Proceedings
3. Effect of hydrogen on Ca and Mg acceptors in GaN
Lee, J.W. ; Pearton, S.J. ; Zolper, J.C. ; Stall, R.A.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.100-109,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
4.

Conference Proceedings
Conference Proceedings
4. III-Nitride ion implantation and device processing
Zolper, J.C. ; Shul, R.J. ; Baca, A.G. ; Pearton, S.J. ; Abernathy, C.R. ; Wilson, R.G. ; Stall, R.A. ; Shur, M.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.149-158,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
5.

Conference Proceedings
Conference Proceedings
5. Ion implantation processing of GaN epitaxial layers
Tan, H.H. ; Williams, J.S. ; Zou, J. ; Cockayne, D.J.H. ; Pearton, S.J. ; Yuan, C.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.142-148,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
6.

Conference Proceedings
Conference Proceedings
6. Ohmic contacts on binary and ternary nitrides
Ren, F. ; Pearton, S.J. ; Donovan, S. ; Abernathy, C.R. ; Cole, M.W.
Pub. info.: Proceedings of the First Symposium on III-V Nitride Materials and Processes.  pp.122-128,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-11
7.

Conference Proceedings
Conference Proceedings
7. The Role of AlN Encapsulation of GaN During Implant Activation Annealing
Zolper, J.C. ; Pearton, S.J. ; Rieger, D.J. ; Baca, A.G. ; Lee, J.W. ; Vartulli, C.R. ; Stall, R.A.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.244-248,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15
8.

Conference Proceedings
Conference Proceedings
8. Comparison of ICI and IBr Plasma Chemistries for Etching of InGaAlP Alloys
Hong, J. ; Lee, J.W ; Lambers, E.S. ; Abernathy, C.R ; Pearton, S.J. ; Constantine, C. ; Hobson, W.S.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.56-64,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15
9.

Conference Proceedings
Conference Proceedings
9. A Structural and Chemical Investigation of WSi Ohmic Contacts to n+-GaN
Cole, M.W. ; Eckart, D.W ; Han, W.Y. ; Monahan, T. ; Ren, F. ; Pearton, S.J.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.271-277,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15
10.

Conference Proceedings
Conference Proceedings
10. Effect of Dry Etching in III-Nitride Surface Properties
Ren, F. ; Lothian, J.R. ; Pearton, S.J. ; Abernathy, C.R. ; Vartuli, C.B. ; Karlicek, B. ; Karlicek, R.F., Jr. ; MacKenzie, J.D. ; Wilson, R.G.
Pub. info.: Proceedings of the Symposium on High Speed III-V Electronics for Wireless Applications and the twenty-fifth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXV).  pp.289-297,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-15