1.

Conference Proceedings
Conference Proceedings
1. Rapid Photothermal Processing of High Dielectric Constant Materials
Singh, R. ; Chen, Y. ; DeBoer, S. ; Thakur, R.P.S.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.204-208,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
2.

Conference Proceedings
Conference Proceedings
2. Advanced DRAM Capacitors Using Tantalum Pentoxide Process Technology
Thakur, R.P.S. ; DeBoer, S.J. ; AI-Shareef, H.N. ; Gealy, D. ; Schuegraf, K. ; Singh, R.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.224-234,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
3.

Conference Proceedings
Conference Proceedings
3. Direct Liquid Injection Assisted Chemical Vapor Deposition of Low Constant Materials
Sharangpani, R. ; Singh, R. ; Parihar, V. ; Thakur, R.P.S.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.15-19,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8