1.

Conference Proceedings
Conference Proceedings
1. High Energy Photon Assisted Rapid Isothermal Processing Based Chemical Vapor Deposition
Singh, R. ; Sharangpani, R. ; Chen, Y.
Pub. info.: Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11.  pp.187-193,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-25
2.

Conference Proceedings
Conference Proceedings
2. Direct Liquid Injection Assisted Chemical Vapor Deposition of Low Constant Materials
Sharangpani, R. ; Singh, R. ; Parihar, V. ; Thakur, R.P.S.
Pub. info.: Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues.  pp.15-19,  1997.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 97-8
3.

Conference Proceedings
Conference Proceedings
3. Chemical Vapor-Deposited Teflon Amorphous Fluoropolymer as an Interlevel Dielectric Material for Low Power Integrated Circuits
Sharangpani, R. ; Singh, R.
Pub. info.: Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.207-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 476