Singh, R. ; Chen, Y. ; DeBoer, S. ; Thakur, R.P.S.
Pub. info.:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues. pp.204-208, 1997. Pennington, NJ. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.187-193, 1997. Pennington, NJ. Electrochemical Society
Chen, Y. ; Singh, R. ; DeBoer, S. ; Thakur, R. P. S.
Pub. info.:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.133-, 1997. Pittsburgh, PA. MRS - Materials Research Society