1.

Conference Proceedings
Conference Proceedings
1. Photoresist materials:a historical perspective
Willson,C.G. ; Dammel,R.R. ; Reiser,A.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.28-41,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
2.

Conference Proceedings
Conference Proceedings
2. Photoresist materials:a historical perspective
Willson,C.G. ; Dammel,R.R. ; Reiser,A.
Pub. info.: Emerging lithographic technologies : 10-11 March 1997, Santa Clara, California.  pp.28-41,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3048
3.

Conference Proceedings
Conference Proceedings
3. Photoresist materials:a historical perspective
Willson,C.G. ; Dammel,R.R. ; Reiser,A.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XI.  pp.38-51,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3050
4.

Conference Proceedings
Conference Proceedings
4. Photoresist materials:a historical perspective
Willson,C.G. ; Dammel,R.R. ; Reiser,A.
Pub. info.: Optical Microlithography X.  pp.28-41,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051