1.

Conference Proceedings
Conference Proceedings
1. Diffusivity measurements in polymers:II.Residual casting solvent measurement by liquid scintillation counting
Gardiner,A.B. ; Qin,A. ; Henderson,C.L. ; Pancholi,S. ; Koros,W.J. ; Willson,C.G. ; Dammel,R.R. ; Mack,C.A. ; Hinsberg,W.D.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.850-860,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
2.

Conference Proceedings
Conference Proceedings
2. Photoresist characterization for lithography simulation:II.Exposure parameter measurements
Henderson,C.L. ; Pancholi,S. ; Chowdhury,S.A. ; Willson,C.G. ; Dammel,R.R.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.816-828,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049
3.

Conference Proceedings
Conference Proceedings
3. Photoresist characterization for lithography simulation:III.Development parameter measurements
Henderson,C.L. ; Tsiartas,P.C. ; Pancholi,S. ; Chowdhury,S.A. ; Dombrowski,K.D. ; Willson,C.G. ; Dammel,R.R.
Pub. info.: Advances in resist technology and processing XIV : 10-12 March 1997, Santa Clara, California.  pp.805-815,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3049