1.

Conference Proceedings
Conference Proceedings
1. Micromachining of glass materials by laser-induced plasma-assisted ablation(LIPAA)using a conventional nanosecond laser
Zhang,J. ; Sugioka,K. ; Midorikawa,K.
Pub. info.: Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California.  pp.363-369,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3618
2.

Conference Proceedings
Conference Proceedings
2. Hybrid laser processing of micromachining for hard materials
Sugioka,K. ; Zhang,J. ; Midorikawa,K.
Pub. info.: Computer-controlled microshaping : 16-18 June 1999, Munich, Germany.  pp.6-17,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3822
3.

Conference Proceedings
Conference Proceedings
3. Precision laser ablation of wide-band-gap materials using VUV-UV multiwavelength excitation
Sugioka,K. ; Zhang,J. ; Wada,S. ; Tashiro,H. ; Midorikawa,K.
Pub. info.: Superstrong laser fields and applications : Laser Optics '98 : 22-26 June 1998, St. Petersburg, Russia.  pp.108-119,  1998.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3683
4.

Conference Proceedings
Conference Proceedings
4. Precise microfabrication of wide-bandgap materials by VUV-UV multiwavelength ablation (Invited Paper)
Sugioka,K. ; Zhang,J. ; Wada,S. ; Tashiro,H. ; Midorikawa,K. ; Toyoda,K.
Pub. info.: Laser Applications in Microelectronic and Optoelectronic Manufacturing III.  pp.44-52,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3274