Beam-solid interactions for materials synthesis and characterization : symposium held November 28-December 2, 1994, Boston, Massachusetts, U.S.A.. pp.293-, 1995. Pittsburgh, Pa.. MRS - Materials Research Society
Thompson, R. H., Jr. ; Krishnamoorthy, V. ; Liu, J. ; Jones, K. S.
Pub. info.:
Defect and impurity engineered semiconductors and devices : symposium held April 17-21, 1995, San Francisco, California, U.S.A.. pp.635-, 1995. Pittsburgh, PA. MRS - Materials Research Society
Liu, J. ; Jones, K. S. ; Downey, D. F. ; Mehta, S.
Pub. info.:
Si front-end processing - physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A.. pp.9-, 1999. Warrendale, PA. MRS - Materials Research Society