Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.263-268, 1989. Pittsburgh, Pa.. Materials Research Society
Thin films : stresses and mechanical properties : symposium held November 28-30, 1988, Boston, Massachusetts, U.S.A.. pp.289-294, 1989. Pittsburgh, Pa.. Materials Research Society
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.197-202, 1989. Pittsburgh, Pa.. Materials Research Society
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.289-294, 1989. Pittsburgh, Pa.. Materials Research Society
Choi, Seong S. ; Kim, S.S. ; Tsu, D.V. ; Lucovsky, G.
Pub. info.:
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.313-318, 1989. Pittsburgh, Pa.. Materials Research Society
Kim, S. S. ; Tsu, D. V. ; Lucovsky, G. ; Fountain., G. G. ; Markunas, R. J
Pub. info.:
Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A.. pp.327-332, 1989. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.265-270, 1989. Pittsburgh, Pa.. Materials Research Society
Amorphous silicon technology, 1989 : symposium held April 25-28, 1989, San Diego, California, U.S.A.. pp.75-80, 1989. Pittsburgh, Pa.. Materials Research Society