1.

Conference Proceedings
Conference Proceedings
1. DEVICE DEGRADING INTERACTIONS BETWEEN SILICIDE FILMS AND BULK DEFECTS DURING RAPID THERMAL ANNEALING
Sparks, D. R. ; Alvi, N. S.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.167-172,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
2.

Conference Proceedings
Conference Proceedings
2. THERMAL STABILITY IN THE /TiSi2/TiN/A1 METALLIZATION SYSTEM
Hamdi, A. H. ; Alvi, N. S. ; Kermani, A. ; Al-Kaisi, M.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.235-240,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
3.

Conference Proceedings
Conference Proceedings
3. LONG-RANGE DIFFUSION OF TRANSITION METALS IN SILICON DURING RAPID THERMAL ANNEALING
Sparks, D. R. ; Alvi, N. S. ; Sanders, K. ; Dayananda, M. A.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.385-390,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146
4.

Conference Proceedings
Conference Proceedings
4. PROPERTIES OF THIN INTER-POLYSILICON REOXIDIZED NITRIDED OXIDES PREPARED BY RAPID THERMAL PROCESSING (TRO/RTN/RTO)
Cheung, Andres W. ; Lo, G. Q. ; Kwong, Dim-Lee ; Alvi, N. S. ; Kermani, a.
Pub. info.: Rapid thermal annealing/chemical vapor deposition and integrated processing : sympoisium held April 25-28, 1989, San Diego, California, U.S.A..  pp.483-488,  1989.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 146