1.

Conference Proceedings
Conference Proceedings
1. CHARACTERIZATION AND EVOLUTION OF MICROSTRUCTURES FORMED BY HIGH DOSE OXYGEN IMPLANTATION OF SILICON
El-Ghor, M.K. ; Pennycook, S.J. ; Sjoreen, T.P. ; Narayan, J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.591-596,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
2.

Conference Proceedings
Conference Proceedings
2. *INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITIOIN
Appleton, B.R. ; Zuhr, R.A. ; Noggle, T.S. ; Herbots, N. ; Pennycook, S.J.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.319-332,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
3.

Conference Proceedings
Conference Proceedings
3. TRANSIENT ENHANCED DIFFUSION IN B+ AND P+ IMPLANTED SILICON
Pennycook, S.J. ; Culbertson, R.J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.379-384,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
4.

Conference Proceedings
Conference Proceedings
4. ION IMPLANTATION AND ANNEALING OF OXIDES
White, C.W. ; Boatner, L.A. ; Skland, P.S. ; McHargue, C.J. ; Pennycook, S.J. ; Aziz, M.J. ; Farlow, G.C. ; Rankin, J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.357-364,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
5.

Conference Proceedings
Conference Proceedings
5. FORMATION OF STABLE POINT DEFECTS IN ION-IMPLANTED Si
Culbertson, R.J. ; Pennycook, S.J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.391-398,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74
6.

Conference Proceedings
Conference Proceedings
6. *INVESTIGATIONS OF LOW-TEMPERATURE EPITAXY, ION DAMAGE, AND REACTIVE-ION CLEANING UTILIZING ION BEAM DEPOSITION
Appleton, B.R. ; Zuhr, R.A. ; Noggle, T.S. ; Herbots, N. ; Pennycook, S.J.
Pub. info.: Beam-solid interactions and transient processes : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.45-58,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 74