1.

Conference Proceedings
Conference Proceedings
1. ANNEALING EFFECT ON PHOTOLUMINESCENCE PROPERTIES OF Be-DOPED MBE GaAs
Shibata, Hajime ; Makita, Yunosuke ; Yamada, Akimasa
Pub. info.: Physics and applications of defects in advanced semiconductors : symposium held November 29-December 1, 1993, Boston, Massachusetts, U.S.A..  pp.267-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 325
2.

Conference Proceedings
Conference Proceedings
2. FORMATION OF SHALLOW ENERGY LEVELS IN Mn+ IMPLANTED GaAs WITH EXTREMELY LOW BACKGROUND IMPURITY CONCENTRATION
Shen, Honglie ; Makita, Yunosuke ; Yamada, Akimasa ; Niki, Shigeru ; Iida, Tsutomu ; Shibata, Hajime ; Fons, Paul ; Obara, Akira
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.343-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
3.

Conference Proceedings
Conference Proceedings
3. FORMATION OF SiGe AND SiGeC LAYERS ON Si BY Ge AND C ION IMPLANTATION AND SUBSEQUENT ION-BEAM-INDUCED EPITAXIAL CRYSTALLIZATION
Kobayashi, Naoto ; Hasegawa, Masataka ; Phillips, J. R. ; Hayashi, Nobuyuki ; Tanoue, Hisao ; Shibata, Hajime ; Makita, Yunosuke
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.771-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
4.

Conference Proceedings
Conference Proceedings
4. NAN0-STRUCTURE Ge FORMED IN THIN FILM SiO2 USING ION IMPLANTATION
Phillips, J. R. ; Hellman, Olof C. ; Kobayashi, N. ; Makita, Yunosuke ; Shibata, Hajime ; Yamada, A. ; Fons, P. ; Tsai, Yushin ; Niki, Shigeru ; Hasegawa, Masataka ; Iida, Tsutomu
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.475-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
5.

Conference Proceedings
Conference Proceedings
5. DAMAGE-FREE ION BEAM DOPING OF CARBON DURING MOLECULAR BEAM EPITAXY OF GaAs
Makita, Yunosuke ; Iida, Tsutomu ; Kimura, Shinji ; Winter, Stefan ; Yamada, Akimasa ; Shibata, Hajime ; Obara, Akira ; Niki, Shigeru ; Tsai, Yushin ; Uekusa, Shin-ichiro
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.965-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
6.

Conference Proceedings
Conference Proceedings
6. EFFECTS OF HYPERTHERMAL CARBON SUBIMPLANTATION DOPING ON THE RAMAN SPECTRA OF GaAs
Fons, P. ; Makita, Yunosuke ; Kimura, Shinji ; Iida, Tsutomu ; Yamada, Akimasa ; Shibata, Hajime ; Obara, Akira ; Tsai, Yushin ; Uekusa, Shin-Ichiro
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.1011-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
7.

Conference Proceedings
Conference Proceedings
7. DISCHARGE-PUMPED VUV F2 MOLECULAR LASER ANNEALING OF HEAVILY Se+-IMPLANTED GaAs
Shibata, Hajime ; Makita, Yunosuke ; Yamada, Kawakatsu ; Uchida, Yutaka ; Satoh, Sabro
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.373-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316
8.

Conference Proceedings
Conference Proceedings
8. LOW TEMPERATURE PHOTOLUMINESCENCE FROM GaAs IMPINGED BY MASS-SEPARATED LOW-ENERGY C+ ION BEAMS DURING MOLECULAR BEAM EPITAXY
Iida, Tsutomu ; Makita, Yunosuke ; Winter, Stefan ; Kimura, Shinji ; Tsai, Yushin ; Kawasumi, Yoko ; Fons, Paul ; Yamada, Akimasa ; Shibata, Hajime ; Obara, Akira ; Niki, Shigeru ; Uekusa, Shin-ichiro ; Tsukamoto, Takeyo
Pub. info.: Materials synthesis and processing using ion beams : symposium held November 29-December 3, 1993, Boston, Massachusetts, U.S.A..  pp.1029-,  1994.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 316