1.

Conference Proceedings
Conference Proceedings
1. Profile Simulation Studies Of Oxide Deposition From Ozone/TEOS
Li, J. ; McVittie, J.P. ; Ferziger, J. ; Saraswat, K.C. ; Schmidt, M. ; Dobkin, D.
Pub. info.: Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films.  pp.570-580,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-16
2.

Conference Proceedings
Conference Proceedings
2. *FACTORS AFFECTING CHARGING DAMAGE DURING PLASMA ETCHING
McVittie, J.P.
Pub. info.: Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III.  pp.59-70,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-9
3.

Conference Proceedings
Conference Proceedings
3. Ion Heating in the Pre-Sheath of a Capacitively Coupled RF Discharge
Brinkmann, R.P. ; Hsiau, K. ; Zheng, J. ; McVittie, J.P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.46-53,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
4.

Conference Proceedings
Conference Proceedings
4. The Effect of Ion Heating on the Angular Distributions in Plasma Etching Processes
Zheng, J. ; McVittie, J.P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.35-45,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
5.

Conference Proceedings
Conference Proceedings
5. Effect of Exposed Gate Oxide Edge on the Plasma Induced Damage After Charging been Eliminated
Ma, S. ; McVittie, J.P.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.163-172,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
6.

Conference Proceedings
Conference Proceedings
6. Profile Modeling of Collimated Ti Physical Vapor Deposition
Bang, D. ; McVittie, J.P. ; IslamRaja, M.M. ; Saraswat, K. C. ; Krivokapic, Z. ; Ramaswami, S. ; Cheung, R.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.557-567,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
7.

Conference Proceedings
Conference Proceedings
7. A New Probe for Direct Measurement of Surface Charging
McVittie, J.P. ; Murakawa, S.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.181-191,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20