Li, J. ; McVittie, J.P. ; Ferziger, J. ; Saraswat, K.C. ; Schmidt, M. ; Dobkin, D.
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Proceedings of the third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films. pp.570-580, 1994. Pennington, NJ. Electrochemical Society
Li, J. ; Moinpour, M. ; Fardi, B. ; Lee, J. ; Thach, D. ; Lawrence, M. ; Dass, A. ; Moghadam, F.
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Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III. pp.31-39, 1994. Pennington, NJ. Electrochemical Society
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.327-, 1994. Tokyo. Elsevier
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.299-, 1994. Tokyo. Elsevier
Spreitzer, R. L. ; Rafalski, S. A. ; Adams, D. ; Russell, S. W. ; Atzmon, Z. ; Li, J. ; Alford, T. L. ; Mayer, J. W.
Pub. info.:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.631-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society
Rafalski, S. A. ; Spreitzer, R. L. ; Russell, S. W. ; Alford, T. L. ; Li, J. ; Moinpour, M. ; Moghadam, F. ; Mayer, J. W.
Pub. info.:
Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A.. pp.613-, 1994. Pittsburgh, Pa.. MRS - Materials Research Society