Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.427-433, 1994. Pennington, NJ. Electrochemical Society
Imizu, Y. ; Toyofuku, M. ; Okazaki, N. ; Itoh, H. ; Tada, A.
Pub. info.:
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.457-, 1994. Tokyo. Elsevier
Imizu, Y. ; Takahara, K. ; Okazaki, N. ; Itoh, H. ; Tada, A. ; Ohnishi, R. ; Ichikawa, M.
Pub. info.:
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.339-, 1994. Tokyo. Elsevier
Itoh, H. ; Matsuyama, S. ; Okazaki, N. ; Imizu, Y. ; Tada, A.
Pub. info.:
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.317-, 1994. Tokyo. Elsevier
Tada, A. ; Oishi, M. ; Okazaki, N. ; Itoh, H. ; Imizu, Y.
Pub. info.:
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.311-, 1994. Tokyo. Elsevier
Imizu, Y. ; Iino, T. ; Tanaka, N. ; Okazaki, N. ; Itoh, H. ; Tada, A. ; Tokumitsu, K. ; Kakegawa, H.
Pub. info.:
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.97-, 1994. Tokyo. Elsevier
Tada, A. ; Ishida, R. ; Okazaki, N. ; Imizu, Y. ; Itoh, H.
Pub. info.:
Acid-base catalysis II : proceedings of the International Symposium on Acid-Base Catalysis II, Sapporo, December 2-4, 1993. pp.321-, 1994. Tokyo. Elsevier