Vanhellemont, J. ; Simoen, E. ; Bosman, G. ; Claeys, C. ; Kaniava, A. ; Gaubas, E. ; Blondeel, A. ; Clauws, P.
Pub. info.:
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.670-683, 1994. Pennington, NJ. Electrochemical Society
Rotondaro, A.L.P. ; Meuris, M. ; Schmidt, H.F. ; Heyns, M.M. ; Vandervorst, W. ; Claeys, C. ; Hellemans, L. ; Snauvaert, I.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.581-586, 1994. Pennington, NJ. Electrochemical Society
Simoen, E. ; Vanhellemont, J. ; Kaniava, A. ; Claeys, C.
Pub. info.:
Proceedings of the Symposium on the Degradation of Electronic Devices due to Device Operation as well as Crystalline and Process-Induced Defects. pp.72-81, 1994. Pennington, NJ. Electrochemical Society
Simoen, E. ; Vandamme, E. ; Rotondaro, A.L.P. ; Claeys, C.
Pub. info.:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.318-323, 1994. Pennington, NJ. Electrochemical Society
Simoen, E. ; Magnusson, U. ; Born, I. ; Vlummens, J. ; Claeys, C. ; Coenen, S. ; Decreton, M.
Pub. info.:
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.375-380, 1994. Pennington, NJ. Electrochemical Society
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.290-295, 1994. Pennington, NJ. Electrochemical Society