1.

Conference Proceedings
Conference Proceedings
1. IMPACT OF OXYGEN DURING POST-GATE PROCESSING ON MOS DEVICE CHARACTERISTICS
Lee, Steven S. ; Lo, G. Q. ; Kwong, D. L.
Pub. info.: Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.253-258,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 225
2.

Conference Proceedings
Conference Proceedings
2. CHEMICAL AND ELECTRICAL PROPERTIES OF FLUORINATED OXIDES PREPARED BY RAPID THERMAL OXIDATION OF Si IN O2 WITH DILUTED NF3
Kuehne, John ; Lo, G. Q. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.367-372,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
3.

Conference Proceedings
Conference Proceedings
3. ELECTRICAL CHARACTERISTICS OF ULTRATHIN STACKED NITRIDE/OXIDE GATE DIELECTRICS PREPARED BY RAPID THERMAL PROCESSING
Ting, W. ; Ahn, J. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.421-424,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
4.

Conference Proceedings
Conference Proceedings
4. CHEMICAL COMPOSITION AND GROWTH KINETICS OF ULTRATHIN OXIDES GROWN BY RAPID THERMAL PROCESSING OF Si IN N2O
Chu, T. Y. ; Ting, W. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.415-420,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
5.

Conference Proceedings
Conference Proceedings
5. *APPLICATION OF RTP-CVD TECHNOLOGY TO ULSI DEVICE FABRICATION
Jung, K. H. ; Hseih, T. Y. ; Kwong, D. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.261-272,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224
6.

Conference Proceedings
Conference Proceedings
6. Si AND GeSi1-x EPITAXIAL GROWTH ON SOI STRUCTURES BY RAPID THERMAL PROCESSING CHEMICAL VAPOR DEPOSITION
Hseih, T. Y. ; Jung, K. H. ; Kwong, D. L. ; Lin, S. ; Marcus, H. L.
Pub. info.: Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.285-292,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 224