1.

Conference Proceedings
Conference Proceedings
1. Comparison of F2 Plasma Chemistries for Deep Etching of SiC
Lee, K.P. ; Leerungnawarat, P. ; Pearton, S.J. ; Ren, F. ; Chu, S.N.G. ; Zetterling, C.-M.
Pub. info.: Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 640
2.

Conference Proceedings
Conference Proceedings
2. Titanium Tungsten (TiW) for Ohmic Contacts to n-and p-Type 4H-SiC
Lee, S.-K. ; Zetterling, C.-M. ; Oestling, M.
Pub. info.: Silicon carbide--materials, processing and devices : symposium held November 27-29, 2000, Boston, Massachusetts, U.S.A..  2001.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 640