Search records | 東京工業大学附属図書館文献データベース

Sort order

3 results

Conference Proceedings

1. CORRELATION BETWEEN Ti-SILICIDED SHALLOW JUNCTION DIODE LEAKAGE AND TITANIUM DIFFUSION DURING TiSi2 FORMATION

Nauka, K. ; Amano, J. ; Scott, M.P. ; Weber, E.R. ; Turner, J.E. ; Tsai, R.

Pub. info.:	Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.319-324, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	71

Conference Proceedings

2. APPLICATION OF THE SILICON INTERSTITIAL BASED INTRINSIC GETTERING PROCESS TO THE FORMATION OF MULTILEVEL DEFECT STRUCTURES

Nauka, K.

Pub. info.:	Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.27-32, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	71

Conference Proceedings

3. ON THE MECHANISM OF INTRINSIC GETTERING BY BUTTERFLY-TYPE DEFECTS IN SILICON

Ueda, O. ; Nauka, K. ; Lagowski, J. ; Gatos, H.C.

Pub. info.:	Materials issues in silicon integrated circuit processing : symposium held April 15-18, 1986, Palo Alto, California, U.S.A.. pp.21-26, 1986. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	71