Klein, P. A. ; Gao, H. ; Vainchtein, A. ; Fujimoto, H. ; Lee, J. ; Ma, Q.
Pub. info.:
Thin films - stresses and mechanical properties VIII : symposium held November 29-December 3, 1999, Boston, Massachusetts, U.S.A.. pp.371-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.47-53, 2000. Pennington, N.J.. Electrochemical Society
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.63-68, 2000. Pennington, N.J.. Electrochemical Society