1.

Conference Proceedings
Conference Proceedings
1. Practical measurement system for determination of refractive index and thickness using low-coherence interferometry
Maruyama,H. ; Inoue,S. ; Ohmi,M. ; Ihara,K. ; Nakagawa,S. ; Haruna,M.
Pub. info.: Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan.  pp.26-29,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3740
2.

Conference Proceedings
Conference Proceedings
2. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings
Conference Proceedings
3. Measurement of effective source shift using a grating-pinhole mask
Sato,K. ; Tanaka,S. ; Fujisawa,T. ; Inoue,S.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part1  pp.99-107,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679