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41 results

Conference Proceedings

1. Interferometric lithography pattern delimited by a mask image

Chen,X. ; Frauenglass,A. ; Brueck,S.R.J.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.496-502, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

Conference Proceedings

2. High-accuracy alignment based on subspace decomposition

Ghazanfarian,A.A. ; Chen,X. ; McCord,M.A. ; Pease,R.F.W.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.502-509, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

3. Application of the Brewster angle illumination technique to eliminate resist-induced alignment errors

Chen,X. ; Ghazanfarian,A.A. ; McCord,M.A. ; Pease,R.F.W.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.951-957, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

4. MBE growth of HgCdTe for infrared focal plane arrays

He,L. ; Yang,J. ; Wang,S. ; Yu,M. ; Wu,Y. ; Qiao,Y. ; Chen,X. ; Fang,W. ; Zhang,Q. ; Gui,Y. ; Chu,J.

Pub. info.:	Detectors, focal plane arrays, and imaging devices II : 18-19 September 1998, Beijing, China. pp.13-22, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3553

Conference Proceedings

5. Spectra characteristics of novel Er:Yb phosphate glass

Song,F. ; Zhang,G. ; Chen,X. ; Shang,M. ; Feng,Y. ; Jiang,S. ; Myers,M.J.

Pub. info.:	Rare-earth-doped devices II : 26-27 January 1998, San Jose, California. pp.46-51, 1998. Bellingham, Washington. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3280

Conference Proceedings

6. Photoreflectance spectroscopy of Si surface ｦﾄ doping on GaAs (001)

Wan,M. ; Liu,X. ; Chen,X. ; Lu,W. ; Shen,S.C.

Pub. info.:	Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China. pp.180-182, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3175

Conference Proceedings

7. 128｡ﾟ1 GaAs/AlGaAs multiple quantum well infrared detector array

Wan,M. ; Ou,H. ; Liu,X. ; Chen,X. ; Li,N. ; Lu,W. ; Shen,S.C. ; Wang,W. ; Huang,Y. ; Zhou,J.

Pub. info.:	Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China. pp.426-428, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3175

Conference Proceedings

8. New method for improving the practical resolution of complex patterns in sub-half-micron lithography

Chen,X. ; Luo,X. ; Yao,H. ; Xiao,Q. ; Yu,G.

Pub. info.:	Optical microlithography XI : 25-27 February 1998, Santa Clara, California. pp.567-578, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3334

Conference Proceedings

9. Imaging interferometric lithography for arbitrary patterns

Chen,X. ; Brueck,S.R.J.

Pub. info.:	Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California. pp.214-224, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3331

10.

Conference Proceedings

10. Hardware-in-the-loop simulation system of the Beijing Simulation Center

Chen,X. ; Jiang,Z. ; Wang,D. ; Zhang,W.

Pub. info.:	Technologies for synthetic environments : hardware-in-the-loop testing III : 13-15 April 1998, Orlando, Florida. pp.10-21, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	3368

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