1.

Conference Proceedings
Conference Proceedings
1. Hot spot management in ultra-low kl lithography [6156-24]
Hashimoto, K. ; Usui, S. ; Nojima, S. ; Tanaka, S. ; Yamanaka, E. ; Inoue, S.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. ENVIRONMENTAL SCIENCES AND THEIR APPLIED TECHNOLOGY Recent Development of Highly Corrosion Resistant Bulk Glassy Alloys
Asami, K. ; Habazaki, H. ; Inoue, A. ; Hashimoto, K.
Pub. info.: New frontiers of processing and engineering in advanced materials : proceedings of the International Conference on New Frontiers of Process Scinence and Engineering in Advanced Materials : The 14th Iketani Conference, November, 24-26, 2004, held in Kyoto, Japan.  pp.225-230,  2005.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 502
3.

Conference Proceedings
Conference Proceedings
3. Optical lithography technologies for 45-nm node CMOS
Kawano, K. ; Sato, K. ; Hayasaki, K. ; Chiba, K. ; Hashimoto, K.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.196-203,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
4.

Conference Proceedings
Conference Proceedings
4. Influence of the Cube-Texture and the Grain Growth on the Creep Behavior in Platinum-10%Rhodium Alloy
Ochiai, S. ; Murakami, T. ; Hashimoto, K. ; Ishii, N. ; Hasegawa, K.
Pub. info.: Textures of materials : ICOTOM 14 : Proceedings of the 14th International Conference on Textures of Materials, held in Leuven, Belgium, July 11-15, 2005.  pp.1547-1552,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 495-497(2)
5.

Conference Proceedings
Conference Proceedings
5. Microwave Power Transmission Experiment on International Space Station
Shinohara, N. ; Matsumoto, H. ; Hashimoto, K.
Pub. info.: AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000.  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 444
6.

Conference Proceedings
Conference Proceedings
6. Epitaxial Growth and Characterization of 4H-SiC(11-20) and (03-38)
Kimoto, T. ; Hashimoto, K. ; Fujihira, K. ; Danno, K. ; Nakamura, S. ; Negoro, Y. ; Matsunami, H.
Pub. info.: Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A..  pp.3-14,  2003.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 742
7.

Conference Proceedings
Conference Proceedings
7. Study on EUV emission properties of laser-produced plasma at ILE, Osaka
Nakai, M. ; Nishimura, H. ; Shigemori, K. ; Miyanaga, N. ; Norimatsu, T. ; Nagai, K. ; Matsui, R. ; Hibino, T. ; Okuno, T. ; Sohbatzadeh, F. S. ; Tao, Y. ; Hashimoto, K. ; Yamaura, M. ; Fujioka, S. ; Nagatomo, H. ; Zhakhovskii, V. ; Nishihara, K. ; Uchida, S. ; Shimada, Y. ; Furukawa, H. ; Nakatsuka, M. ; Izawa, Y.
Pub. info.: Laser-generated and other laboratory X-ray and EUV sources, optics, and applications : 4-6 August 2003, San Diego, California, USA.  pp.289-297,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5196
8.

Conference Proceedings
Conference Proceedings
8. Establishment of a model predicting tensile shear strength and fracture portion of laser-welded lap joints
Furusako, S. ; Miyazaki, Y. ; Hashimoto, K. ; Kobayashi, J.
Pub. info.: First International Symposium on High-Power Laser Macroprocessing : 27-31 May 2002, Osaka, Japan.  pp.197-202,  2003.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4831
9.

Conference Proceedings
Conference Proceedings
9. 17-P-13 - Pore size analysis with H2O adsorption measurement of organically modified MCM-41 type materials
Igarashi, N. ; Nakai, K. ; Hashimoto, K. ; Tatsumi, T.
Pub. info.: Zeolites and mesoporous materials at the dawn of the 21st century : proceedings of the 13th International Zeolite Conference, Montpellier, France, 8-13 July 2001.  pp.224-224,  2001.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 135
10.

Conference Proceedings
Conference Proceedings
10. The effect of debris on collector optics, its mitigation and repair: next-step a gaseous Sn EUV DPP source
Oizumi, H. ; Yamanashi, H. ; Nishiyama, I. ; Hashimoto, K. ; Ohsono, S. ; Masuda, A. ; Izumi, A. ; Matsumura, H.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.572-577,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751