Singh, R. ; Chen, Y. ; DeBoer, S. ; Thakur, R.P.S.
Pub. info.:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues. pp.204-208, 1997. Pennington, NJ. Electrochemical Society
Thakur, R.P.S. ; DeBoer, S.J. ; AI-Shareef, H.N. ; Gealy, D. ; Schuegraf, K. ; Singh, R.
Pub. info.:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues. pp.224-234, 1997. Pennington, NJ. Electrochemical Society
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.187-193, 1997. Pennington, NJ. Electrochemical Society
Sharangpani, R. ; Singh, R. ; Parihar, V. ; Thakur, R.P.S.
Pub. info.:
Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues. pp.15-19, 1997. Pennington, NJ. Electrochemical Society
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.369-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Chen, Y. ; Singh, R. ; DeBoer, S. ; Thakur, R. P. S.
Pub. info.:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.133-, 1997. Pittsburgh, PA. MRS - Materials Research Society
Vedula, L. ; Singh, R. ; Ratakonda, D. ; Rohatgi, A. ; Narayanan, S.
Pub. info.:
Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.437-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Low-dielectric constant materials III : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.207-, 1997. Pittsburgh, Pa.. MRS - Materials Research Society
Vedagarbha, V. ; Singh, R. ; Ratakonda, D. ; Vedula, L. ; Rohatgi, A. ; Narayanan, S.
Pub. info.:
Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.425-, 1997. Pittsburgh, PA. MRS - Materials Research Society