Sakaguchi, K. ; Tsuboi, T. ; Yanagita, K. ; Okabe, T. ; Takahashi, K. ; Sato, N.
Pub. info.:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia. pp.31-38, 2003. Pennington, NJ. Electrochemical Society
Fomin, S. ; Shimizu, A. ; Matsuki, K. ; Sakaguchi, K. ; Hashida, T.
Pub. info.:
Sixth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering : 10-16 June, 2002, St. Petersburg, Russia. pp.216-221, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering