Metrology, inspection, and process control for microlithography XII : 23-25 February 1998, San Clara, California. pp.482-487, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia. pp.121-125, 1999. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Distributed and multiplexed fiber optic sensors VI : 5-6 August 1996, Denver, Colorado. pp.153-158, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Smart electronics and MEMS : 11-13 December 1997, Adelaide, Australia. pp.284-289, 1997. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advanced materials for optics and precision structures : 8 August 1996, Denver, Colorado. pp.12-20, 1996. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advanced photonic sensors and applications : 30 November-3 December 1999, Singapore. pp.436-440, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Detection and remediation technologies for mines and minelike targets III : 13-17 April 1998, Orlando, Florida. Part 1 pp.218-231, 1998. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Advanced photonic sensors and applications : 30 November-3 December 1999, Singapore. pp.131-138, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Third International Conference on Thin Film Physics and Applications : 15-17 April 1997, Shanghai, China. pp.104-107, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering