Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California. pp.440-447, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Qian, S. ; Ma, C. ; Qian, J. ; Chen, Y. ; Cai, R. ; Lin, L. ; Qian, W. ; Zou, Y.
Pub. info.:
Recent Advances in the Chemistry and Physics of Fullerenes and Related Materials : proceedings of the twelfth International Symposium. pp.390-397, 1999. Pennington, NJ. Electrochemical Society