Caricato, A. P. ; Cazzaniga, F. ; Cerofolini, G. F. ; Crivelli, B. ; Polignano, M. L. ; Tallarida, G. ; Valeri, S. ; Zonca, R.
Pub. info.:
Ultrathin SiO[2] and high-K materials for USLI gate dielectrics : symposium held April 5-8, 1999, in San Francisco, California, U.S.A.. pp.135-, 1999. Warrendale, PA. MRS - Materials Research Society