Chow, Y.F. ; Foo, T.H. ; Shen, L. ; Pan, J.S. ; Du, A. Y. ; Xing, Z.X. ; Yuan, Y.J. ; Li, C.Y. ; Kumar, R. ; Foo, P.D.
Pub. info.:
Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.. pp.563-568, 2002. Warrendale. Materials Research Society
Smart materials II : 16-18 December 2002, Melbourne, Australia. pp.351-355, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering