1.

Conference Proceedings
Conference Proceedings
1. Impact of water and top-coats on lithographic performance in 193-nm immersion lithography
Hiroi, Y. ; Kishioka, T. ; Sakamoto, R. ; Maruyama, D. ; Sakaida, Y. ; Matsumoto, T. ; Nakajima, Y. ; Chon, S. ; Kim, Y. ; Yoon, S. ; Han, S. ; Yoon, E.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.20-30,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
2.

Conference Proceedings
Conference Proceedings
2. Growth of GaN Films on Porous 4H-SiC Substrate by Metal-Organic Chemical Vapor Deposition
Jeong, J.K. ; Song, H.K. ; Um, M.Y. ; Kim, H.J. ; Seo, H.C. ; Yoon, E. ; Hwang, C.S.
Pub. info.: Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003.  pp.1597-1600,  2004.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 457-460
3.

Conference Proceedings
Conference Proceedings
3. Growth and in situ analysis of InAs/InP quantum dot stack and its far infrared absorption properties (Invited Paper)
Hwang, H. ; Park, K. ; Yoon, S. ; Yoon, E. ; Cheong, H.M. ; Kim, Y.D.
Pub. info.: Quantum Sensing: Evolution and Revolution from Past to Future.  pp.229-237,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4999