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Conference Proceedings

1. ELTRAN(R); SOI-Epi WaferTM by Epitaxial Layer Transfer from Porous Si

Yonehara, T. ; Sakaguchi, K.

Pub. info.:	Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium. pp.313-317, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-25

Conference Proceedings

2. Mechanism of Pore-Enlargement in Double Porous Si Layers

Sakaguchi, K. ; Kurisu, H. ; Ohmi, K. ; Yonehara, T.

Pub. info.:	Pits and Pores : formation, properties, and significance for advanced materials : proceedings of the International Symposium. pp.318-325, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-25

Conference Proceedings

3. CVD-Epitaxial Growth on Porous Si for ELTRAN SOl-Epi Wafers

Sato, N. ; Ishii, S. ; Yonehara, T.

Pub. info.:	CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition. pp.435-441, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-13