1.

Conference Proceedings
Conference Proceedings
1. Detection of SOI Fatal Defects by Cu Decoration in Conjunction with HF Immersion
Notsu, K. ; Honma, N. ; Yonehara, T.
Pub. info.: Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium.  pp.57-62,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-3
2.

Conference Proceedings
Conference Proceedings
2. Volume Production in ELTRANr SOI-Epi WafersTM
Isaj, H. ; Nakayama, J. ; Yonehara, T.
Pub. info.: Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium.  pp.45-50,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-3
3.

Conference Proceedings
Conference Proceedings
3. Scalable Potential and Volume Production in ELTRAN (R); SOI-Epi WafersTM
Sakaguchi, K. ; Yonehara, T.
Pub. info.: Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia.  pp.197-204,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-27