1.
Conference Proceedings
Chen,Y.T. ; Lin,C.H. ; Lin,H.T. ; Hsieh,H.C. ; Yu,S.S. ; Yen,A.
Pub. info.:
Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA . Part1 pp.99-110, 2000. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4000
2.
Conference Proceedings
Wang,Y.-Y. ; Lin,H.-T. ; Yu,S.-S. ; Chen,C.-K. ; Ku,Y.-C. ; Yen,A. ; Lin,B.J.
Pub. info.:
Optical Microlithography XIV . 4346 pp.276-292, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
3.
Conference Proceedings
Wang,C.-M.A. ; Lin,S.-J. ; Lin,C.-H. ; Ku,Y.-C. ; Yen,A.
Pub. info.:
20th Annual BACUS Symposium on Photomask Technology . pp.275-286, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186