1.

Conference Proceedings
Conference Proceedings
1. Surface shape measurement using a wavelength-scanning Fizeau interferometer
Yamamoto,A. ; Yamaguchi,I. ; Yano,M.
Pub. info.: Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan.  pp.614-617,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3740
2.

Conference Proceedings
Conference Proceedings
2. Hierarchical processing for accurate optical proximity correction for 1-Gb DRAM metal layers
Kobayashi,S. ; Uno,T. ; Yamamoto,K. ; Tanaka,S. ; Kotani,T. ; Inoue,S. ; Higurashi,H. ; Watanabe,S. ; Yano,M. ; Ohki,S. ; Tsunakawa,K.
Pub. info.: Optical microlithography XII : 17-19 March 1999, Santa Clara, California.  Part2  pp.614-621,  1999.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3679
3.

Conference Proceedings
Conference Proceedings
3. Surface shape measurement of tilted surfaces by wavelength scanning interferometry
Yamamoto,A. ; Yamaguchi,I. ; Yano,M.
Pub. info.: Interferometry '99 : applications : 20-23 September 1999, Pułtusk, Poland.  pp.32-39,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3745
4.

Conference Proceedings
Conference Proceedings
4. Surface topography by wavelength scanning interferometry
Yamaguchi,I. ; Yamamoto,A. ; Yano,M.
Pub. info.: Laser interferometry IX : applications : 22-23 July 1998, San Diego, California.  pp.24-32,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3479
5.

Conference Proceedings
Conference Proceedings
5. Lens-coupled laser-diode module integrated on silicon platform
Nakagawa,G. ; Miura,K. ; Tanaka,K. ; Yano,M.
Pub. info.: Laser Diode Chip and Packaging Technology.  pp.59-64,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2610
6.

Conference Proceedings
Conference Proceedings
6. Pattern-data preparation method to enchance high-throughput mask fabrication in variable-shaped e-beam writing system
Hara,S. ; Murakami,E. ; Magoshi,S. ; Koyama,K. ; Anze,H. ; Ogawa,Y. ; Kabeya,A. ; Ooki,S. ; Saito,T. ; Fujii,T. ; Sakamoto,S. ; Suzuki,H. ; Yano,M. ; Watanabe,S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.410-417,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793