1.

Conference Proceedings

Conference Proceedings
Yang, H. ; Bao, M. ; Yin, H. ; Shen, S. ; Xiong, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.31-37,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
2.

Conference Proceedings

Conference Proceedings
Yin, H. ; Bao, M. ; Yang, H. ; Shen, S. ; Xiong, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.167-172,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601