1.

Conference Proceedings
Conference Proceedings
1. 0.35 um and sub-0.35 um Matal Stack Etch in a DPS Chamber - DPS Chamber and Process Characterization
Ye, Y. ; Ma, D. ; Hanawa, H. ; Loewenhardt, P. ; Zhao, A. ; Shiau, J. ; Yan, C. ; Webb, T. ; Mak, S. ; Papanu, J. ; Yin, G.
Pub. info.: Proceedings of the eleventh International Symposium on Plasma Processing.  pp.222-233,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-12
2.

Conference Proceedings
Conference Proceedings
2. Morphology and Quantitative Nitrogen Impurity Measurements in Homoepitaxial Chemical Vapor-Deposited Diamond
Catledge, S. A. ; Vohra, Y. K. ; Yan, C. ; Tohver, H. T.
Pub. info.: Thin films - structure and morphology : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A..  pp.635-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 441
3.

Conference Proceedings
Conference Proceedings
3. BOND-SLIP MECHANISMS IN STEEL MICRO-FIBER REINFORCED CEMENT COMPOSITES
Banthia, N. ; Yan, N. ; Chan, C. ; Yan, C. ; Bentur, A.
Pub. info.: Microstructure of cement based systems/ Bonding and interfaces in cementitious materials : symposia held November 28-December 1, 1994, Boston, Massachusetts, U.S.A..  pp.539-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 370