1.

Conference Proceedings
Conference Proceedings
1. Toward DFM: process worthy design and OPC through verification method using MEEF, TF・MEEF, and MTT [6156-21]
Kim, I.-S. ; Suh, S. ; Jung, S. ; Lee, E. ; Kang, Y.-S. ; Lee, S. ; Woo, S.-G. ; Cho, H.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. Improving model-based OPC performance for sub-60nm devices using real source optical model [6156-32]
Jung, S. ; Kim, I.-S. ; Kang, Y.-S. ; Yeo, G.-S. ; Woo, S.-G. ; Cho. H. ; Moon, K.-T.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61561H-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156