1.

Conference Proceedings
Conference Proceedings
1. STRUCTURAL CHANGES DURING TRANSIENT POST-ANNEALING OF PREANNEALED AND ARSENIC IMPLANTED POLYCRYSTALLINE SILICON FILMS
Krause, S.J. ; Wilson, S.R. ; Gregory, R.B. ; Paulson, W.M. ; Leavitt, J.A. ; McIntyre Jr., L.C. ; Seerveld, J.L. ; Stoss, P.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.145-152,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
2.

Conference Proceedings
Conference Proceedings
2. *AN OVERVIEW AND COMPARISON OF RAPID THERMAL PROCESSING EQUIPMENT: A USERS VIEWPOINT
Wilson, S.R. ; Gregory, R.B. ; Paulson, W.M.
Pub. info.: Rapid thermal processing : symposium held December 2-4, 1985, Boston, Massachusetts, U.S.A..  pp.181-190,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 52
3.

Conference Proceedings
Conference Proceedings
3. Kinetic effects and mechanisms limiting substitutional solubility in the formation of supersaturated alloys by pulsed laser annealing
White, C.W. ; Appleton, B.R. ; Stritzker, B. ; Zehner, D.M. ; Wilson, S.R.
Pub. info.: Laser and electron-beam solid interactions and materials processing : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.59-66,  1981.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 1
4.

Conference Proceedings
Conference Proceedings
4. Thermal stability of ion implanted, laser annealed films
Wilson, S.R. ; Paulson, W.M. ; Tam, G. ; Gregory, R.B. ; White, C.W. ; Appleton, B.R.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.287-292,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4
5.

Conference Proceedings
Conference Proceedings
5. Zone refining of nonsubstitutional impurities during pulsed laser annealing
White, C.W. ; Naramoto, H. ; Williams, J.M. ; Narayan, J. ; Appleton, B.R. ; Wilson, S.R.
Pub. info.: Laser and electron-beam interactions with solids : proceedings of the Materials Research Society Annual Meeting, November 1981, Boston Park Plaza Hotel, Boston, Massachusetts, U.S.A..  pp.241-248,  1982.  New York.  North Holland
Title of ser.: Materials Research Society symposia proceedings
Ser. no.: 4
6.

Conference Proceedings
Conference Proceedings
6. EFFECT OF ANNEALING ON THE STRUCTURE OF BURIED SiO2 LAYERS FORMED BY ELEVATED TEMPERATURE HIGH DOSE OXYGEN IMPLANTATION
Krause, S.J. ; Jung, C.O. ; Wilson, S.R. ; Lorigan, R.P. ; Burnham, M.E.
Pub. info.: Semiconductor-on-insulator and thin film transistor technology : symposium held December 3-6, 1985, Boston, Massachusetts, U.S.A..  pp.257-262,  1985.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 53
7.

Conference Proceedings
Conference Proceedings
7. NUCLEATION AND GROWTH OF OCTAHEDRAL OXIDE PARTICLES IN SILICON: OXYGEN ION IMPLANTATION
Carpenter, R.W. ; Vangerschaeve G. ; Vanker, C. J. ; Wilson, S.R.
Pub. info.: Oxygen, carbon, hydrogen, and nitrogen in crystalline silicon : symposium held December 2-5, 1985, Boston, Massachusetts, U.S.A..  pp.309-316,  1986.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 59