1.
Conference Proceedings |
Zavada, J.M. ; Wilson, R.G. ; Pearton, S.J. ; Lee, B.K. ; Steckl, A.J.
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2.
Conference Proceedings |
2. Novel in-situ ion bombardment process for a thermally stable (>800 C) plasma deposited dielectric
Ren, F. ; Lothian, J.R. ; Pearton, S.J. ; Wilson, R.G. ; LaRoche, J.R. ; Lee, J.W. ; Johnson, D. ; Zavada, J.M.
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