Optomechanical design and engineering 2001 : 2-3 August 2001, San Diego, USA. pp.238-255, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Infrared technology and applications XXVII : 16-20 April 2001, Orlando, USA. pp.14-24, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California. pp.449-459, 2000. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
A collection of technical papers : AIAA Modeling and Simulation Technologies Conference, Montreal, Canada, 6-9 August 2001. pp.189-196, 2001. Reston, VA. American Institute of Aeronautics and Astronautics
Title of ser.:
AIAA Paper : AIAA Modeling and Simulation Technologies Conference
Metrology, Inspection, and Process Control for Microlithography XV. pp.234-244, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering